Abstract
In the present paper, the physical and chemical resistance to Fluorine of ceramic coating materials ( and ZrO-) were studied. and ZrO- specimens coated by thermal plasma spray were tested inside Fluoro-carbon plasma chamber, and their resistance performance to Fluorine was compared. From the comparison, it was verified that ZrO- has physically and chemically stronger resistance to Fluorine than . This characterization about the physical and chemical resistance of coating materials can be applied to provide further insights on how to optimize the coating material and engineer the chamber design for future technology.
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