Abstract
The X-ray scattering method is investigated in application of characterizing surface roughness of X-ray grazing incidence telescope. The surface figure effect on the scattering diagram of the curved rough mirror is analyzed in detail based on generalized Harvey-Shack surface scatter theory and image formation theory, when smooth-surface approximation is met and the width of the incident beam is about one tenth of spatial wavelength of the surface figure. Based on the analysis, the characterizing scheme is designed and the determination error of the one-dimensional power spectral density function due to the finite width of the receiving slit before the detector is discussed. The scheme is simulated with Zemax and the simulated results verify that the surface figure only affects the measuring accuracy of the low-spatial-frequency surface roughness. The method overcomes difficulty in measuring roughness of the grazing incidence mirror with high resolution conveniently during the development of the X-ray grazing incidence telescope.
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