Abstract
The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.
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