Abstract
Mesoporous silica (MPS) thin films were characterized by X-ray analysis and electrical measurements to investigate possible correlation between structural order and best response of this kind of sensing material toward RH and alcohols vapours. Both energy dispersive X-ray diffraction and X-ray reflectometry results have been discussed to describe the ordered porosity distribution in the amorphous film. A phenomenological trend of the resistive-type sensors response changing calcination has been found and related to the change in the porosity order of MPS thin film.
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