Abstract
An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a transmission electron microscope (TEM) has been developed to improve the accuracy of nanoscale material analysis. TES microcalorimeters generally have a sensitive surface area on the order of 100 × 100 µm2. Furthermore, because of the magnetic field generated by the TEM objective lens, a TES microcalorimeter cannot be placed in a TEM column. Therefore, a polycapillary lens is used for collecting X-rays emitted by a TEM specimen on the TES microcalorimeter. The X-ray transmission characteristics of the polycapillary lens typically depend on the geometrical arrangements of the optics and the X-ray energy. Energy spectrum measurements were carried out for X-rays transmitted by a polycapillary lens installed in a TEM for evaluating X-ray transmission characteristics of the optics. Values of the focal spot size and the intensity gain were obtained by analyzing the experimental energy spectra in the energy range of 1.0–14.0 keV.
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