Abstract
The coordination of C atoms in diamond-like carbon (DLC) thin films formed by Ar gas cluster ion beam (GCIB) assisted deposition using fullerene as a carbon source was investigated using X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. From the curve fitting analysis of XPS spectra of the C 1s core level, the absolute sp2 and sp3 contents in the DLC films formed by Ar GCIB-assisted deposition were evaluated for the first time. The absolute sp3 content of DLC films formed by the GCIB-assisted deposition at an acceleration voltage of 5 kV was the highest compared with that formed at 7 and 9 kV. In addition, the absolute sp2 contents evaluated from XPS spectra were compared to the relative sp2 contents evaluated from NEXAFS spectra.
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