Abstract

An X-ray microprobe system for X-ray fluorescence (XRF) analysis and spectroscopy has been developed at SPring-8 BL39XU; it comprises an X-ray focusing or collimation system, energy-dispersive (ED) and wavelength-dispersive (WD) XRF spectrometers, and a sample-scanning system. The conventional ED spectrometer will be utilized for qualitative and quantitative trace-element analysis, and the WD spectrometer will be used both for trace-element analysis and XRF spectroscopy. A combination of monochromated undulator radiation and the WD spectrometer will enable resonant XRF spectroscopy using brilliant hard X-ray undulator radiation.

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