Abstract
AbstractX‐ray diffraction and x‐ray‐excited fluorescence analysis are powerful techniques for the nondestructive measurement of crystal structure and chemical composition. When a small‐area x‐ray microbeam is used as the probe, chemical composition, crystal structure, crystalline texture, and crystalline strain distributions can be determined. These distributions can be studied both at the surface of the sample and deep within the sample.This article reviews the physics, advantages, and scientific applications of hard x‐ray (E > 3 keV) microfluorescence and x‐ray microdiffraction analysis. Because practical x‐ray microbeam instruments are extremely rare, a special emphasis is placed on instrumentation, accessibility, and experimental needs which justify the use of x‐ray microbeam analysis.
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