Abstract
A hard X-ray microbeam created from a sputtered-sliced Fresnel zone plate has been tested at SPring-8 undulator beamline. Focusing properties are evaluated in the X-ray wavelength regions of 0.15– 1.5 A ̊ . The measured focal beam size is about 0.6 μm at an X-ray wavelength of 1.4 A ̊ . In a scanning microscopy experiment, resolution-test-patterns with 0.2 μm structure are resolved at an X-ray wavelength of 0.45 A ̊ .
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