Abstract
X-ray elastic constants for the (422) and (333)/(511) reflections of the {111} textured TiN coating were determined. The coating exhibited high elastic anisotropy. The X-ray elastic constant of the (422) reflection was comparable with those predicted from single crystal elastic compliances on the basis of the Voigt and Reuss models, whereas a significant deviation from these models was found for (333)/(51I). The residual stress of the coating was determined by X-ray diffraction and bi-metal deflection techniques. The magnitude of residual stress in the coating calculated using the measured X-ray elastic constants was in good agreement with these two reflections and, within experimental scatter, the values were also consistent with those obtained from the deflection measurement.
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