Abstract
ABSTRACTThe determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in patterned lines of tungsten has been performed to investigate the effect of various passivation. For unpassivated lines, the stresses are biaxial and decrease with decreasing line width. Passivation over patterned lines results in triaxial tensile stress. The stress along the line is not changed by the passivation. The stress across the line decreases as the line width decreases. The third component of stress, perpendicular to the surface, which appears with the passivation, increases with decreasing line width. High compressive intrinsic stress in the passivation does not result in high tensile stress in the metal line.
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