Abstract
Flouride CaF 2-SrF 2 superlattices (SLs) grown by molecular beam epitaxy have been studied by means of X-ray diffractometry for the first time. The diffraction patterns showed reasonably good crystalline quality of the SLs and a type-B epitaxial relation to the Si(111) substrate. From the analysis of the crystal truncation rod (CTR) profiles, based on the pseudomorphic model, it was obtained that despite the same high temperature (770°C) of formation of the CaF 2/Si(111) interface its structure depended on the growth temperature of the SLs. The shape of the CTR profiles confirmed the existence of the superlattice which consists of one or two monolayer thick SrF 2 layers. Some CaF 2/SrF 2-interface roughness was noticeable.
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