Abstract

A method for the characterization of surfaces and interfaces on a nanometer scale by combining specular and nonspecular glancing incidence X-Ray scattering is presented. The application of the method to crystalline silicon, polycrystalline silicon, and a thin gold layer on a silicon substrate is reported

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call