Abstract
A novel measurement method that addresses the self-absorption effect, which is a significant disadvantage in X-ray absorption spectroscopy in fluorescence yield mode for surface analysis, is proposed. The validity and features were experimentally verified using copper. This method uses the l-line fluorescence that cascades from the KLL Auger process caused by K-shell absorption. The obtained spectrum is unaffected by the self-absorption effect and is not distorted. The confirmed features are that the spectral oscillation with a wide energy range is obtained, and the analysis depth is comparable to that of the l-edge measurement. In addition, the proposed method theoretically applies to samples with uneven surfaces, that is, various actual materials.
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