Abstract
Microwave soft magnetic films (SMFs) are key materials, which can effectively miniaturize and multifunctionalize the electromagnetic components and devices, such as filters, phase shifters, thin film wireless inductors, magnetic recording write heads, antennas, etc.1, and reduce their occupation area in microwave monolithic integrated circuit (MMIC) boards. Modern electronic products are heading towards high density, high-frequency, frequency tunability, lightweight and low energy consumption, etc., which give rise to increasing demands for microwave SMFs. Microwave SMFs should have higher ferromagnetic resonance frequency (f FMR ), high permeability, and are to be fabricated in an IC compatible process. Metallic soft magnetic films exhibit special advantages in MMIC devices since they have higher 4πM S and permeability, and good compatibility with the IC fabrication process. Therefore, self-biased metallic SMFs prepared at IC compatible process have drawn an increasing attention2.
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