Abstract
Different levels of order of amorphous silicon (a-Si) samples have been measured by XANES (X-ray Absorption Near Edge Structure) and EXAFS (Extended X-ray Absorption Fine structure) analysis. The EXAFS analysis has been carried out by using a first-shell fitting procedure while in the XANES part we have extracted the high-frequency residuals which change with the level of order. From this analysis a continuous increase of local ordering has been found as a function of the substrate deposition temperature of the a-Si films.
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