Abstract
In many electronic applications, the surface properties of hydrogen-terminated diamond films determine the eventual performance of the electronic device. In this work, diamond films were grown by hot-filament chemical vapor deposition method and hydrogenated films were obtained by hydrogen plasma treatment. X-ray photoelectron spectroscopy analysis was carried out to evaluate the film surface after annealing treatment. The C1s XPS spectrum showed the C1s spectrum changed after annealing treatment. In air atmosphere, hydrogen decreased and oxygen absorption increased. The interaction on the surface changed drastically after annealed in argon atmosphere and phase transition would happen when the annealing temperature increased to 600°C.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
