Abstract
A surface derivatization technique was applied to the XPS analysis of inorganic carbons. Radiofrequency (13. 56 MHz) plasma with CF4 gas has been used for the surface derivatization. Various kinds of graphites and diamonds that had been analysed by XRD and EELS were studied. The XPS data were analyzed with regard to the difference of binding energy between C1s-F1s (ΔEF-C), and the ratio of fluorine and carbon (F/C). It was found that diamond, graphite and amorphous-carbon could be discriminated with ΔEF-C, and that crystallinity could be estimated with F/C.
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