Abstract

Undoped and Mn(II)-doped barium strontium titanate (BST) thin films have been prepared by a "water based" sol-gel method. With this method, BST stock solution can be easily doped with any concentration of aqueous metal ion solution and can be stocked for 3∼4 days at room temperature. The crystallization temperature of 650 ∼750 is suitable for the films from traded-off of both the X-ray diffraction (XRD) patterns and the surface topography. The Mn 2p 3/2 X-ray photoelectron spectra (XPS) pattern is given for the first time in the thin film and shows the valence state of the Mn-doped BST has a same valance with the Mn(II) dopant. Considering the peak shift of the binding energy, it is proposed that the Fermi level of the Mn-doped BST has been shifted down by 0.7 eV.

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