Abstract
XPS (X-ray Photoelectron Spectroscopy) or ESCA (Electron Spectroscopy for Chemical Analysis) as a surface analytical technique has been developed over years and has been used successfully in characterization of a variety of thin films. Information such as composition, chemical states, depth profile, imaging and thickness of thin films is especially useful in thin film research. This paper aims at reviewing these applications of XPS in thin film area.
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