Abstract
X-ray photoelectron spectroscopy (XPS) and cathodoluminescence (CL) method have been employed to study the chemical composition and the oxygen vacancy concentration of HfO2 , Sc2 O3 and (HfO2 )1−x (Sc2 O3 )x films. It was found that the increase of Sc content led to monotonic decreasing the Hf4 f7/2 and Sc2 p3/2 binding energies indicating to form solid solution (HfO2 )1−x (Sc2 O3 )x . All the samples characterized by the intensive CL spectra with maximum around 3 eV which originated due to some radiative recombination emission caused by oxygen deficiency. The concentration of oxygen vacancy in the Sc-doped HfO2 is sensitive to the Sc content and as a result the intensity of CL spectra of (HfO2 )1−x (Sc2 O3 )x is lower that those of pure HfO2 and Sc2 O3 .
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