Abstract
The various gas sensors were designed for detection of different gases in the air using different oxides and impurities [1-3]. For example the manufacturing of ammonia sensors on the basis of CuxS-micro-porous-Si structure includes manufacture of micro-porous silicon, drawing on it of SiO2 isolating layer, and then the CuxS layer [4, 5]. The special equipment for all these processes is needed. More usable method for sensor production is so-called soft chemistry or sol–gel synthesis [6, 7].
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