Abstract
The advantage of focused Xe+ beams over other rare gas species have been investigated [Zhukov, V.; Kalbitzer, S. Russ. Microelectron. 2011, 40(1), 17–24]. In particular, the higher operation temperature of a super-tip gas field ion source for xenon ions is one outstanding technical feature. The properties of focused Xe+ beams are estimated with special reference to optimised ion-optical transport systems. Applications to both ion beam materials modification and ion beam materials analysis are outlined.
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