Abstract

A significant increase of the XeF laser efficiency has been observed in an electron beam pumped device. Mixtures of NF3, Xe, and Ne at 300 K and a density of 3 amagat were pumped at a rate of 300 kW/cm3 with a 500-ns pulse. This deposited 150 J/l into the laser cavity. Measurements were made for various mixtures and output couplings. The highest intrinsic laser efficiency (defined as the ratio of laser output energy to e-beam energy deposited into the gas) observed was 4.7%.

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