Abstract
This paper demonstrates X-band periodically loaded meandered coplanar waveguide (CPW) structure based phase shifter built on Barium Strontium Titanate (BST: Ba x Sr 1-x TiO 3 ) ferroelectric substrate. CPW line has been loaded with 29 nos. interdigital capacitors (IDC) whose capacitance is varied with application of bias voltage, due to ferroelectric property of BST material. Design of IDC loaded meandered CPW line with integrated bias tee and DC blocking mechanism has been presented and analyzed using 2.5D electromagnetic solver. 800 phase shift and 4.8dB insertion loss at 10.5GHz for voltage range of 0-400V has been achieved in simulation. Scanning performance of 4 elements linear array has also been analyzed for maximum 800 phase shift. Designed phase shifter has been developed using 0.5μm thick BST layer with Ba 0.6 Sr 0.4 TiO 3 composition has been realized using SolGel technique.
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