Abstract
A voltge-dependent maximum value is observed in the measured X-ray intensities of a element of low Z under the condition of constant specimen current in electron probe analysis. In order to explain this phenomenon, the voltages giving the maximum intensity have been measured for specimens containing the elements ranging from B to Mg with a variety of mass absorption coefficients. And the variation of the depth distribution of OKα with voltage has been estimated as an example of X-rays of low Z from the result of CuKα calculated by Shimizu, Murata and Shinoda by using the Thomson-Whiddington energy loss law and the equation for the ionization cross section of the K shell derived by Green and Cosslett.It is found that the voltage giving the maximum intensity is propotional to −log(μ⁄ρ) and the maximum value of the depth distribution immediately below observed specimen surface in case of low Z increases with decreasing voltage.The voltage dependence of the measured X-ray intensity from elements of low Z is well explained by the above results.
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