Abstract
The Au atomic Mα characteristic Xray spectrum has been measured for the slow highly charged ions Arq+ (q= 7—14) impacting on Au surface. The result shows that as long as the charge state of projectile is higher（q=11）， the characteristic Xrays of heavy atomic can be effectively excited even though the ionic beam is very weak(nA magnitude)， and the single ionic Xray yield is in the order of 10-8 and increases with potential energies of projectiles.
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