X-ray plasma source design simulations

Abstract

The optimization of soft x-ray production from a laser-produced plasma for lithographic applications is discussed in the context of recent experiments by Kauffman et al. [Appl. Opt. 32, 6897 (1993)], which indicate that a conversion efficiency of 0.01 can be obtained with Sn targets at modest laser intensity. Computer simulations of the experiments delineate the critical phenomena underlying these high conversion efficiencies, especially the role of hydrodynamic expansion and radiative emission. Qualitative features of the experiments are reproduced, including the transition from one-dimensional to two-dimensional flow. The quantitative discrepancy is ascribed to incorrect initiation of the ablating plasma and to inadequate atomic transition rate evaluation.