Abstract
Using the high-brilliant synchrotron radiation at SPring-8 we have studied the SiO2/Si interface structures, the interface state densities, and the uniformities of ∼1-nm-thick oxide films formed by three kinds of atomic oxygen at 300 °C by measuring Si 2p photoelectron spectra at the photon energy of 1050 eV and the energy loss spectra of O 1s photoelectrons at the photon energy of 714 eV. Among silicon oxide films studied here the abrupt compositional transition at SiO2/Si interface, the smallest deviation in interface state density, the interface state density comparable to that for thermal oxide formed in dry oxygen at 950 °C, and the highest uniformity was obtained with oxide film formed in krypton-mixed oxygen (Kr:O2=97:3) plasma.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
