Abstract
The impact of the air-exposure of an electroplated cobalt film has been investigated to assess the effect of oxygen interaction on metallic cobalt surface. XPS is used in order to evaluate the Co2p spectra of different time air exposure. We demonstrate that the oxidation start very quickly and then is stabilized toward a limited oxide thickness. Dipping oxidized electrodeposited Co film in two acidic solutions (HCl 1M and Kari© aveni acidic Co chemistry) shows that the oxide dissolution must be considered as a main phenomenon for the seed layer during plating process.
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