Abstract
An experimental–analytical method for the nondestructive structural and chemical composition mapping of single-crystal alloys is proposed, implemented, and successfully tested. The technique is based on analytical measurements of phase and amplitude changes in a narrow polychromatic region near the absorption edge of the alloy impurity. Synchrotron radiation energies of 11.096–11.105 keV were used to measure the Bragg diffraction profiles near the absorption edge of germanium at 11.103 keV in SiGe/Si crystal alloy superstructures. Physical dimensions and chemical composition of SiGe alloys were determined with a spatial resolution 8.6 Å.
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