Abstract
A novel synchrotron X-ray nanodiffraction approach for the quantitative characterization of strain and microstructure depth gradients in nanocrystalline thin films is introduced. Experiments were performed using monochromatic X-ray beams 100 and 250 nm in diameter on a 15 μm thick CrN thin film. The results reveal a correlation between applied deposition conditions and a complex residual strain depth profile with a step-like shape and superimposed low-amplitude oscillations. Microstructure analysis shows multiple grain nucleation sites, smooth texture transitions and oscillating grain size distributions.
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