Abstract

AbstractThin films of YBaCuO were prepared on MgO and SrTi03/Al2 03 substrates by rf magnetron sputtering. The SrTi03 was deposited onto AI2O3 by flash evaporation. The as‐deposited films on both substrates had an (001) orientation and were superconductors. Annealing the films in O2 improved their crystal 1inity and raised their critical temperatures (Tc). A detailed X‐ray diffraction study of the YBaCuO films was carried out. Values for the particle sizes and nonuniform strains along the c axis were obtained from broadened diffraction lines by using an integral breadth method. It was found that the broadening was mainly caused by nonuniform strain. It was also observed that nonuniform strain decreased as the films were annealed at various temperatures. The Tc's of the films were very sensitive to changes in nonuniform strain.

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