Abstract
This review presents the features of the application of X-ray fluorescence analysis to the study of a chemical composition and thickness of films and surface coatings. Examples of X-ray fluorescence analysis of coating surfaces of simple and complex configurations are presented. The variants of considering the matrix effects and coating thickness for various materials are discussed. The possibilities of methodological techniques using scattered primary X-ray radiation or fluorescence radiation from a substrate on which a film is applied to determine its attenuating characteristics are discussed. The features determination of the chemical composition and coatings thickness and thin films when using the XRF version with total external reflection (TXRF) spectrometers are considered. The examples of performance of conventional XRF analysis are given. The results of a round‐robin test with application of X‐ray fluorescence thickness determination of multilayered samples (Au/Ni/Cu) on a chromium coated quartz glass substrate were presented and discussed.
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