Abstract
The method of X-ray fluorescence analysis with the fluorescence excitation by an electron beam with 30 keV energy was used to determine the germanium, arsenic, and selenium content in the Ge1–xSex, As1–xSex, and Ge1–x–yAsySex glassy alloys. This technique allows determining the quantitative glass composition with an accuracy of ±0.0002 in the surface layer of a depth of ~0.1 µm from parameters x and y of the linear calibration dependences.
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