Abstract
The evolution of the phase composition, nanostructure parameters, and macroscopic stress in soft magnetic Fe95 − xZr5Nx films (prepared by ion-plasma deposition onto quartz substrates) during their annealing has been investigated by X-ray diffraction. During deposition, depending on the N content, either a mixed structure composed of an X-ray amorphous phase enriched in Zr and N and a crystalline phase (α-Fe(N) solid solution) or an X-ray amorphous phase enriched in Fe, Zr, and N is formed in the films. During annealing, depending on the temperature and nitrogen content, different combinations of crystalline phases (α-Fe(N) and Zr(N) solid solutions, α-Fe, Fe4N, Fe2N, ZrO2) are formed in the films. The large compressive stress formed in the films during deposition changes to a lower tensile stress during annealing.
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