Abstract
A method to measure the crystallite size and its distribution as a function of depth in multilayer thin films is described. The principle relies on the idea that when x-rays are scattered at an interface the incident and scattered waves create a standing wave whose periodicity can be varied and thereby enhance the scattering at certain depths. Practical examples of this method are given for $\mathrm{Nb}∕\mathrm{Al}$ periodic multilayers, one of which indicates considerable macrostrain for the surface layer and a variation in microstrain as a function of depth. The theoretical modeling of the scattering process is presented, which includes the influence of the general density modulation and interfacial roughness. Both these contributions are shown to be necessary to account for the experimental scattering profiles.
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