X-ray diffraction determination of the composition of In x Ga1 − x Sb solid solution

Abstract

A procedure to determine the composition of InxGa1 − xSb solid solution by X-ray diffraction is described. In order to calculate the indium content in a solid solution, an expression is proposed which relates the cell size of an undeformed layer with the dimensions of a tetragonally distorted unit cell of the layer under strain caused by a discrepancy in the dimensions of the layer and substrate lattices. The procedure yields results that well agree with measurements of the solid solution composition in a layer by energy dispersive spectroscopic control performed using an electron microscope.