Abstract
X-ray diffraction analysis through high-resolution X-ray rocking curve measurement and X-ray topography was performed on Czockralski (CZ) -grown ScAlMgO4 (SAM) substrates. An extremely narrow rocking curve width of 0.002° (7.2 arcsec) was obtained, and the three-dimensional (3D) configuration of dislocations in the interior of the SAM crystal structure was analyzed through 3D section topography. Burgers vectors of dominating dislocations with slip planes of (0001) were determined to be parallel to the a-axis of the SAM crystal, and the dislocations were found to form clusters.
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