Abstract
The overall performance of a 100-pixel superconducting tunnel junction (STJ) array detector in the soft X-ray region was determined by measuring fluorescent X-rays from light elements. The yield of working STJs in the fabricated detector was 90%, and the leakage current for these 90 STJs was 11.6±2.5 nA. The STJs had an intrinsic energy resolution for O-Kα X-rays (524.9 eV) of 10.2±1.7 eV (FWHM). The deviation from energy linearity was −0.042±0.45%, 0.793±0.91%, and 0.135±1.31% for O-Kα (524.9 eV), N-Kα (392.4 eV) and B-Kα (183.3 eV) X-rays, respectively. Most of the STJs exhibited uniform X-ray detection characteristics. In addition, the detector could discriminate the N-Kα peak in the fluorescent X-ray spectrum from n-type SiC doped with 300 ppm nitrogen.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
