Abstract
This article reports Lithium Niobate (LN) based shear horizontal (SH0) resonators utilizing suspended and solidly mounted structures for radio frequency (RF) applications. The solidly mounted SH0 structure (also termed guided SH0 structure) is advantageous in obtaining reduced temperature coefficient of frequency (TCF), reduced high frequency overtone spurious responses, and improved power handling. The demonstrated solidly mounted guided SH0 resonators exhibit a mechanical Q as high as 1316 around 950 MHz, and electromechanical coupling factor (k <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> ) of around 21.8 % - resulting in a figure of merit (FoM = k <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> · Q) of 288.
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