Abstract
본 논문에서는 X-대역 능동 위상 배열 레이더 시스템에 사용되는 MMIC 다기능 칩을 0.5 <TEX>${\mu}m$</TEX> p-HEMT 상용 공정을 이용하여 저전력 특성을 가지도록 개발하였다. 다기능 칩은 6-비트 디지털 위상 천이 기능, 6-비트 디지털 감쇠 기능, 송/수신 모드 선택 기능, 신호 증폭 기능 등의 다양한 기능을 제공한다. <TEX>$16mm^2(4mm{\times}4mm)$</TEX> 칩 크기의 소형으로 제작된 MMIC 다기능 칩은 7~11 GHz에서 10 dB의 송/수신 이득 특성과 14 dBm의 P1dB 특성을 가지며, DC 소모 전력이 0.6 W로 매우 낮은 저전력 특성을 보였다. 그리고 6-비트, 64 상태에 대해 위상 천이 특성과 감쇠 특성의 측정 결과, 동작 주파수에서 <TEX>$3^{\circ}$</TEX>의 RMS(Root Mean Square) 위상 오차와 0.6 dB의 RMS 감쇠 오차를 보였다. An MMIC multi-function chip with a low DC power consumption for an X-band active phased array radar system has been designed and fabricated using a 0.5 <TEX>${\mu}m$</TEX> GaAs p-HEMT commercial process. The multi-function chip provides several functions: 6-bit phase shifting, 6-bit attenuation, transmit/receive switching, and signal amplification. The fabricated multi-function chip with a compact size of <TEX>$16mm^2(4mm{\times}4mm)$</TEX> exhibits a gain of 10 dB and a P1dB of 14 dBm from 7 GHz to 11 GHz with a DC low power consumption of only 0.6 W. The RMS(Root Mean Square) errors for the 64 states of the 6-bit phase shift and attenuation were measured to <TEX>$3^{\circ}$</TEX> and 0.6 dB, respectively over the frequency.
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