Abstract

Three-dimensional woodpile photonic crystals with a variety of crystal orientations and surfaces, including (110), (001), (100) and (010) planes, are fabricated in GaAs and silicon with the multi-directional etching method. The optical properties of the fabricated woodpile photonic crystals are characterized via reflectance spectra measurement. High reflectivity is observed in 1200 nm to 1550 nm wavelength, exhibiting a photonic bandgap. The ultra-high-Q microcavities designed by unit cells size modulation consist of straight dielectric rods only; therefore, they could be fabricated by the directional etching methods. A high quality factor is expected in the microcavity fabricated by the one-top, one-side etching approach.

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