Abstract

We demonstrated a wireless vibration sensing system powered by a piezoelectric vibration energy harvester (VEH). The VEH with an AlN piezoelectric film was fabricated using a standard semiconductor micro electric mechanical system technology. Vibration with >0.45 m/s2 acceleration was applied to the VEH and a 40 bit payload was successfully sent using 920 MHz wireless communication technology driven by electrical energy generated from the VEH with an ultralow-power power management circuit.

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