Wireless Thermal Bubble Accelerometer on a Flexible Substrate

Abstract

This paper proposes an innovated method to integrate an active RFID tag with a thermal bubble accelerometer on a flexible substrate, thus it can become a wireless acceleration sensor for easy usage. In this paper a semi-cylindrical chamber filled with Xe (xenon) gas is proposed to replace the original rectangular with CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> . Comparing the response times (32G) are also made; we note the response time with Xe gas is about 51.6% of CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> . On the other hand, comparisons of sensitivity and response time are also made with semi-cylindrical chamber; note the sensitivity with CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> is better at lower G's, but the performances are degraded above 18G and even lower than with Xe above 28G. We see the response times (32G) with Xe is about 20.2% of CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> . Besides, the response speed is doubled with Xe by using semi-cylindrical chamber instead of the rectangular one.