Wireless Piezoelectric Motor Drive

Abstract

Nanopositioners with embedded piezoelectric motors are used in a variety of industries, from microscopy to laser processing or measurement systems. A concrete example would be fine-tuning of multiple mirror or lens units in a system. After fine adjustment of a mirror or lens, its position is expected to be maintained when the system is not energized. Features such as small size, direct drive, and maintaining position with high rigidity at power off make inertia-type piezoelectric motors suitable for such “set and go”-type applications. However, wiring with dedicated control electronics for each positioner can increase system complexity. In this study, a wireless driving method for piezoelectric inertia-type motors is introduced for the first time, to the best of our knowledge. In our approach, sawtooth signals for driving a two-phase piezoelectric inertia motor are converted into two complementary pulse-width-modulated (PWM) signals at 1.0 MHz and amplified by class-D amplifier topology, in which GaN transistors are implemented. The amplified complementary PWM signals are applied to a transmitter coil. A receiver coil, which forms an LC network with the capacitances of the piezoelectric multilayer actuators, picks up the driving signals. The filtered voltage waveform by the receiver coil is converted into a modified sawtooth signal, which can operate the piezoelectric inertia-type motor wirelessly. Initial measurements revealed that even a single driving pulse can be transmitted to the receiver coil and precise movements of the slider can be obtained. Mean step sizes for single pulse drive are 140 nm in one direction and 125 nm in the reverse direction.