Abstract

A chip with which to manipulate microparticles using wireless power transfer and pulse-driven dielectrophoresis has been designed and fabricated using a 0.18-µm CMOS process. The chip enables microparticle manipulation under a 0.7-V power supply and a 13-MHz clock, which are generated on the chip by means of an on-chip coil, a rectifier, and a Schmitt trigger circuit.

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