Abstract
This paper reports for the first time wireless measurement of open loop micro coils inductance, inter winding capacitance and parasitic resistance. Wireless read out is performed using an inductively coupled passive system which consists of an electrically small magnetic loop antenna as a sensing coil and an open loop test micro coil. Further an equivalent circuit model is established which includes the parasitic capacitive coupling effects of the measurement setup. The actual parameters i.e. inductance, inter winding capacitance and resistance of open micro coils are extracted from the wirelessly measured signal and compared with the modeled results.
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