Abstract
Wireless Inertial Sensors Made on Flexible Substrates and Based on Thermal Convection and Near-Field-Communication Principles
Highlights
Conventional accelerometers, inclinometers, and rate gyros are fabricated on silicon.(1–17) Some are made using thermal convection technologies, and their chambers may be filled with air, CO2, or liquids
It was reported that the sensitivity of an inclinometer can be increased by using a nonfloating-type structure on a flexible substrate without fabricating the conventional cavities of floating-type silicon-based devices.(7–12) the chamber may be filled with an inert gas such as Xe to avoid the oxidizing effect caused by CO2 or air
The linearity is better for accelerations larger than 18 G’s, and the case using a hemicylindrical chamber filled with Xe gas with a stacked layer is more linear; the sensitivity is 0.227 °C/G
Summary
Conventional accelerometers, inclinometers, and rate gyros are fabricated on silicon.(1–17) Some are made using thermal convection technologies, and their chambers may be filled with air, CO2, or liquids. It was reported that the sensitivity of an inclinometer can be increased by using a nonfloating-type structure on a flexible substrate without fabricating the conventional cavities of floating-type silicon-based devices.(7–12) the chamber may be filled with an inert gas such as Xe to avoid the oxidizing effect caused by CO2 or air. Both the reliability and life cycle of heaters and thermal sensors can be increased. This paper is organized as follows: the first section is the introduction; the part describes the fabrication and packaging steps; the third part is simulation and discussion; and the last part is conclusions
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