Abstract

High-performance flexible pressure sensors have attracted more attention because of their high-sensitivity, strong-flexibility, implantable and wearable characteristics. Here, we propose a flexible high-performance pressure sensor using a micro-patterned graphene/polydimethylsiloxane (Gr/PDMS) composite as the dielectric layer, which is sandwiched by folding the PDMS substrate with the cavity and the wrinkled continuous Au pattern as the antenna and electrode. By investigating graphene with different concentration, the composite with a thickness of 200 μm and a concentration of 2% as the dielectric layer exhibits the highest sensitivity. The sensors are tested under cyclic pressure, exhibiting outstanding stability and durability, low detection limit, and rapid response time, and they can be utilized to detect subtle pressure. In addition, the sensors can be sensitive to hand bending and facial muscle movements, and thus they have the potential to be used for highly sensitive wireless detection in the wide range of wearable electronic devices, bionic-electronic skins and intelligent robot.

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